JPH0184438U - - Google Patents

Info

Publication number
JPH0184438U
JPH0184438U JP1987179566U JP17956687U JPH0184438U JP H0184438 U JPH0184438 U JP H0184438U JP 1987179566 U JP1987179566 U JP 1987179566U JP 17956687 U JP17956687 U JP 17956687U JP H0184438 U JPH0184438 U JP H0184438U
Authority
JP
Japan
Prior art keywords
rails
tables
axis direction
piezoelectric motor
sample moving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987179566U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987179566U priority Critical patent/JPH0184438U/ja
Publication of JPH0184438U publication Critical patent/JPH0184438U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
JP1987179566U 1987-11-27 1987-11-27 Pending JPH0184438U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987179566U JPH0184438U (en]) 1987-11-27 1987-11-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987179566U JPH0184438U (en]) 1987-11-27 1987-11-27

Publications (1)

Publication Number Publication Date
JPH0184438U true JPH0184438U (en]) 1989-06-05

Family

ID=31471113

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987179566U Pending JPH0184438U (en]) 1987-11-27 1987-11-27

Country Status (1)

Country Link
JP (1) JPH0184438U (en])

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000028652A1 (en) * 1998-11-05 2000-05-18 Japan Science And Technology Corporation Ultrasonic motor
JP2002329771A (ja) * 2001-04-26 2002-11-15 Kyocera Corp ステージ装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000028652A1 (en) * 1998-11-05 2000-05-18 Japan Science And Technology Corporation Ultrasonic motor
JP2002329771A (ja) * 2001-04-26 2002-11-15 Kyocera Corp ステージ装置

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